مبانی لایه نشانی شیمیایی بخار (CVD)

Fundamentals of Chemical Vapor Deposition

مبانی لایه نشانی شیمیایی بخار (CVD)

ABSTRACT

Chemical vapor deposition is a synthesis process in which the chemical constituents react in the vapor phase near or on a heated substrate to form a solid deposit. The CVD technology combines several scientific and engineering disciplines including thermody- namics, plasma physics, kinetics, fluid dynamics, and of course chemistry. In this chapter, the fundamental aspects of these disci-plines and their relationship will be examined as they relate to CVD.

 

مهندسی سطح surface engineering

surface engineering

مهندسی سطح

ABSTRACT

Surface engineering encompasses the research and technical activity aimed at the design, manufacturing, investigation and utilization of surface layers, both for technological and for end use, with properties better than those of the core [7] Surface engineering can be the key to improve performance for many products by improving their properties, such as corrosion resistance, wear resistance, fatigue limit etc Surface engineering practices play a major role in ameliorating problems and enhancing prospects for advancement in three major areas of technology, corrosion, wear and manufacturing [8] The expanding use of surface engineering generated a need for understanding or at least an awareness of the physical and chemical properties of materials (coatings/substrate), their mechanical properties and especially structure/property relationships in materials